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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

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Range Expansion Technology for Ring MEMS Gyroscopes Based on Drive Voltage Modulation.

Ke Cui¹, Li Liu², Daren An¹

¹School of Instrument and Electronics, North University of China, Taiyuan 030051, China.

|January 8, 2025

Summary

This summary is machine-generated.

Controlling the driving voltage in micro-electro-mechanical systems (MEMS) gyroscopes adjusts sensitivity. Lower voltages significantly expand the gyroscope

Keywords:

MEMS ring gyroscope detecting open-loop drive control loop in-circuit debugging nonlinear range expansion

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Area of Science:

Engineering
Physics
Materials Science

Background:

Micro-electro-mechanical systems (MEMS) gyroscopes are crucial for inertial sensing.
Controlling MEMS gyroscope sensitivity is key to optimizing performance for various applications.
Existing methods for sensitivity control may have limitations in range and precision.

Purpose of the Study:

To investigate the relationship between driving control voltage and the operational range of a ring MEMS gyroscope.
To develop a mathematical model correlating driving voltage with gyroscope sensitivity.
To optimize MEMS gyroscope performance across a wide measurement range.

Main Methods:

Utilizing micro-electro-mechanical systems (MEMS) technology for gyroscope fabrication.
Systematically varying the driving control voltage applied to the MEMS gyroscope.
Evaluating gyroscope performance metrics including range, resolution, and nonlinearity at different voltages.
Developing a mathematical model to describe the voltage-sensitivity relationship.

Main Results:

Lower driving voltages were found to significantly increase the measurement range of the MEMS gyroscope.
At 1.46 V, the gyroscope achieved a range of ±1000°/s, a fivefold increase from ±200°/s at 10.85 V.
Performance degradation (resolution, nonlinearity) was notably less than the scale of range expansion.
Optimized gyroscope performance across the operational range was achieved compared to modulation detection circuitry gains.

Conclusions:

Adjusting the driving control voltage is an effective method for tuning the sensitivity and range of ring MEMS gyroscopes.
The established mathematical model provides a basis for predicting and controlling gyroscope behavior.
This voltage-based control strategy offers a promising approach for enhancing MEMS gyroscope utility in diverse sensing applications.