Insulator Material Deposited with Molybdenum Disulphide Prospective for Sensing Application

Two-dimensional molybdenum disulfide (MoS₂) exhibits interesting properties for applications in micro and nano-electronics. The key point for sensing properties of a device is the quality of the material's surface. In this study, MoS₂ layers were deposited on polymers by pulsed laser deposition (PLD). This process was monitored by a mass quadrupole spectrometer to record the emissions of MoS₂ and evaluate the amount of molybdenum and sulfur compounds generated. The changes in laser parameters during the PLD strongly affect the properties of the formed MoS₂ film. The exploration of the composition and structure of the films was followed by Attenuated Total Reflectance-Fourier Transform Infrared (ATR-FTIR), Atomic Force Microscopy (AFM), and mass quadrupole spectrometer (MQS). The possible application of the fabricated composite as a sensor is preliminarily considered.