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Integration of Through-Sapphire Substrate Machining with Superconducting Quantum Processors
Narendra Acharya1, Robert Armstrong1, Yashwanth Balaji1
1Oxford Quantum Circuits, Thames Valley Science Park, Shinfield, Reading, RG2 9LH, UK.
Advanced Materials (Deerfield Beach, Fla.)
|January 19, 2025
Summary
A novel sapphire machining process enables through-substrate electrical connections for quantum processors. This breakthrough facilitates scaling quantum computing hardware and improving qubit performance using sapphire substrates.
Area of Science:
- Quantum Computing
- Materials Science
- Microfabrication
Background:
- High-coherence qubits are essential for fault-tolerant quantum computers.
- Sapphire substrates support high-coherence qubits due to their low-loss dielectric properties.
- Current limitations in sapphire processing restrict quantum processors to small scales or chiplet architectures.
Purpose of the Study:
- To demonstrate a sapphire machining process compatible with high-coherence qubits.
- To enable through-substrate electrical connections and signal routing in sapphire-based quantum processors.
- To facilitate the scaling of quantum processing units (QPUs) using sapphire.
Main Methods:
- Development of a specialized sapphire machining technique.
- Integration of the machining process with intermediate-scale quantum processors.
- Demonstration of through-substrate electrical connections for mode-mitigation and signal routing.
Main Results:
- The demonstrated machining process is compatible with high-coherence qubits.
- Through-substrate electrical connections were successfully achieved in sapphire.
- The technique provides a pathway for scaling sapphire-based quantum processing units.
Conclusions:
- The developed sapphire machining process overcomes previous limitations in scaling quantum processors.
- This advancement allows for integrated mode-mitigation and signal routing in larger sapphire QPUs.
- The process enables the use of sapphire-compatible materials for large-scale quantum computing applications.

