Enhanced broadband quantum efficiency in LWIR T2SL detectors with guided-mode resonance structure

Type-II superlattice (T2SL) detectors are emerging as key technologies for next-generation long-wavelength infrared (LWIR) applications, particularly in the 8-14 µm range, offering advantages in space exploration, medical imaging, and defense. A major challenge in improving quantum efficiency (QE) lies in achieving sufficient light absorption without increasing the active layer (AL) thickness, which can elevate dark current and complicate manufacturing. Traditional methods, such as thickening the absorber, are limited by the short carrier lifetime in T2SLs, necessitating alternative solutions. In this study, we introduced a guided-mode resonance (GMR) structure into T2SL LWIR detectors to enhance QE while maintaining a thin AL for efficient carrier collection. The GMR structure was fabricated by introducing a grating array on the surface of the detector and an Au mirror beneath the absorber. This configuration enhanced light trapping, which introduced additional resonance modes. The optimized grating design, with a 5 µm period and a fill factor of 0.6, significantly increased absorption, as predicted by finite-difference time-domain (FDTD) simulations and confirmed experimentally. The GMR-enhanced T2SL detector demonstrated a 2.58-fold improvement in QE over conventional LWIR detectors and a 1.33-fold increase compared to Fabry-Pérot (FP) resonance-based detectors in the 6-11 µm range. Despite exhibiting an almost identical dark current density, the GMR LWIR detector demonstrated superior performance, featuring a broader cut-off wavelength of 9.3 µm and higher QE compared to FP LWIR detectors.