Silicon computational spectrometer with 32-channel meta-structures

We present a compact silicon-on-insulator computational spectrometer utilizing a 32-channel meta-structure array. By exploiting the high design flexibility of meta-structures, each channel is engineered to possess a distinct transmission spectrum, facilitating high-resolution spectral reconstruction. The meta-structures, with a minimum feature size of 70 nm, occupy a footprint of 1.15 µm × 24.5 µm per channel. Experimental results corroborate the device's performance, demonstrating a spectral resolution of 50 pm in the C-band.