Enhanced Conductivity of Multilayer Copper-Carbon Nanofilms via Plasma Immersion Deposition

Haotian Weng1, Xiwu Zhang2, Xuan Liu3

  • 1Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, 200240, People's Republic of China.

Nano-Micro Letters
|February 5, 2025
PubMed