Thermo-Tuning Fourier Transform Spectrometer Based on SU-8 Waveguide

On-chip Fourier transform spectrometer (FTS) is a promising technology due to the compact size, low cost, and relatively high throughput. In this work, we design, fabricate, and characterize a Mach-Zehnder interferometer (MZI) FTS based on SU-8 polymer waveguide. The optical path length difference of MZI is tuned by a heater with a maximum power consumption of 2.2 W. The interference signal is analyzed by Fourier transform algorithm, to retrieve the spectrum of light source. The footprint of the fabricated FTS device is only 2 × 12 mm², with the spectral bandwidth of ~100 nm and resolution <20 nm.