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Updated: May 27, 2025

Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures
Published on: December 5, 2015
Functionalized Sc2N as Ohmic-contact electrodes for monolayer PtSe2: an ab initio study
Hong Li1, Jiahui Li1, Chaoyang Fan1
1College of Mechanical and Material Engineering, North China University of Technology, Beijing 100144, P. R. China. lihong@ncut.edu.cn.
Abstract:
Functionalized Sc2N monolayers are potential ideal electrodes for two-dimensional semiconductors owing to their broad scope of work functions and smooth surfaces. We studied the possibility of functionalized Sc2N as Ohmic-contact electrodes for monolayer (ML) PtSe2 Schottky barrier field-effect transistors (SBFETs) and simulated the device performances from an ab initio study. The surface functionalization of Sc2N weakened the interface coupling with ML PtSe2. The bands from each component of the PtSe2/Sc2NF2 and PtSe2/Sc2N(OH)2 vertical heterostructures were almost maintained, and n-type Ohmic contacts were found in both the vertical and lateral interfaces. The valence bands of the PtSe2/Sc2NO2 vertical heterostructure showed apparent hybridization, and a p-type Ohmic contact was found in the lateral interface. Particularly, the n-type ML PtSe2 SBFET with Sc2N(OH)2 electrodes possessed a near-ideal subthreshold swing (62 mV dec-1) and surpassed the high-performance target of the International Roadmap for devices and systems for the year 2037 in terms of on-state current (1166 vs. 790 μA μm-1), delay time (0.41 vs. 0.84 ps), and power dissipation (0.24 vs. 0.40 fJ μm-1).

