Direct chemical lithography writing on 2D materials by electron beam induced chemical reactions

Due to their high surface-to-volume ratio and native band gaps, two-dimensional (2D) materials are widely used as supports for metal nanoparticle (NP) catalysts. Various synthesis methods exist to prepare such materials, but controlling the amount, size, and distribution of the deposited NPs remains a challenge. Here, we investigate the use of electron beam lithography (EBL) for this purpose. A dual-beam focused ion beam-scanning electron microscope (FIB-SEM) was used to direct the deposition of platinum NPs (Pt NPs) onto 2D graphene oxide, functionalized with epoxy and hydroxyl (HUGO) or carboxyl (TOGO) groups, and black phosphorus (BP) sheets. According to NP size, the deposition was conducted for various exposure times and several types of particle distribution. EDS confirmed the required chemical composition of all of the prepared materials. SEM showed the amount and distribution of the supported NPs, and TEM confirmed their size. Raman spectroscopy revealed a strong bonding between the NPs and the support sheets according to the type of 2D support. These results suggest that EBL is a promising method for the target-controlled deposition of metal NPs of targeted amount, size, and spatial distribution onto 2D materials, which enables evaluating the specific influence of the NP-support interaction on enhanced catalytic activity.