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Dynamic Multi-Axis Calibration of MEMS Accelerometers for Sensitivity and Linearity Assessment.

Luciano Chiominto1, Giulio D'Emilia1, Antonella Gaspari2

  • 1Department of Industrial and Information Engineering and Economics, University of L'Aquila, 67100 L'Aquila, Italy.

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|April 12, 2025
PubMed
Summary

This study calibrated micro-electromechanical systems (MEMS) accelerometers using a custom test bench. The calibration determined accelerometer linearity and sensitivity, providing a complete uncertainty budget for precise measurements.

Keywords:
multi-axis calibrationthree-axis micro-electromechanical systems (MEMS) accelerometeruncertainty assessmentuncertainty modeling

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Area of Science:

  • Metrology and Instrumentation
  • Mechanical Engineering
  • Sensor Technology

Background:

  • Accurate calibration of accelerometers is crucial for reliable data acquisition.
  • Micro-electromechanical systems (MEMS) accelerometers are widely used but require precise calibration.
  • Existing calibration methods may not provide comprehensive uncertainty assessments.

Purpose of the Study:

  • To calibrate commercial triaxial MEMS accelerometers.
  • To develop a custom test bench for simultaneous multi-axis calibration.
  • To establish a complete uncertainty budget for the calibration process.

Main Methods:

  • Utilized a custom-designed test bench with a rotating table for calibration.
  • Performed simultaneous assessment of all accelerometer measurement components.
  • Generated precise reference accelerations from 0 to 8 Hz.
  • Developed a working model for uncertainty budget calculation.
  • Conducted experimental uncertainty assessment for linearity and sensitivity.

Main Results:

  • Evaluated linearity and sensitivity of MEMS accelerometers at various sensor levels.
  • Determined single values for linearity and sensitivity per accelerometer, analyzing each axis.
  • Revealed the achievable uncertainty levels based on the calibration data.
  • Demonstrated the influence of data analysis methods on uncertainty.

Conclusions:

  • The custom calibration setup provides a reliable method for assessing MEMS accelerometer performance.
  • A comprehensive uncertainty budget can be established for the described calibration procedure.
  • Understanding the impact of data processing on uncertainty is key for accurate sensor evaluation.