Dynamic Multi-Axis Calibration of MEMS Accelerometers for Sensitivity and Linearity Assessment

Area of Science:

• Metrology and Instrumentation
• Mechanical Engineering
• Sensor Technology

Background:

• Accurate calibration of accelerometers is crucial for reliable data acquisition.
• Micro-electromechanical systems (MEMS) accelerometers are widely used but require precise calibration.
• Existing calibration methods may not provide comprehensive uncertainty assessments.

Purpose of the Study:

• To calibrate commercial triaxial MEMS accelerometers.
• To develop a custom test bench for simultaneous multi-axis calibration.
• To establish a complete uncertainty budget for the calibration process.

Main Methods:

• Utilized a custom-designed test bench with a rotating table for calibration.
• Performed simultaneous assessment of all accelerometer measurement components.
• Generated precise reference accelerations from 0 to 8 Hz.
• Developed a working model for uncertainty budget calculation.
• Conducted experimental uncertainty assessment for linearity and sensitivity.

Main Results:

• Evaluated linearity and sensitivity of MEMS accelerometers at various sensor levels.
• Determined single values for linearity and sensitivity per accelerometer, analyzing each axis.
• Revealed the achievable uncertainty levels based on the calibration data.
• Demonstrated the influence of data analysis methods on uncertainty.

Conclusions:

• The custom calibration setup provides a reliable method for assessing MEMS accelerometer performance.
• A comprehensive uncertainty budget can be established for the described calibration procedure.
• Understanding the impact of data processing on uncertainty is key for accurate sensor evaluation.