Real-time monitoring of photodegradation in photoresists using a quartz crystal microbalance
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Updated: May 11, 2025
Sample Preparation in Quartz Crystal Microbalance Measurements of Protein Adsorption and Polymer Mechanics
Published on: January 22, 2020
Zhun Gu1, Kaitong Yang2, Hayford Boamah2
1School of Biomedical Sciences, Suzhou Chien-shiung Institute of Technology 1 Jianxiong Road Suzhou 215411 China zhuzq@csit.edu.cn.
Abstract:
We report a quantitative method for the real-time evaluation of photoresist performance that integrates laser irradiation with quartz crystal microbalance (QCM) sensing technology. The results obtained for the model photoresist AZ1518 correlated with the traditionally obtained ones. Furthermore, the system revealed viscoelastic transitions and shear stress evolution during photoreactions.
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