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Updated: May 11, 2025

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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
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A 0.05 mm3 diode-based single charged-particle real-time radiation detector for electron radiotherapy
Kyoungtae Lee1,2, Rahul Lall3, Michel M Maharbiz3
1The University of California, San Francisco, USA.
Physics and Imaging in Radiation Oncology
|April 18, 2025
Summary
Real-time radiation monitoring using a novel single electron sensitive detector is now possible for electron radiotherapy. This technology enhances precision for moving targets and critical organs, improving treatment safety.
Area of Science:
- Medical Physics
- Radiation Oncology
- Detector Technology
Background:
- Real-time, single-particle level radiation monitoring is crucial for advanced electron radiotherapy.
- Current methods lack the precision needed for dynamic targets and organs at risk (OARs).
Purpose of the Study:
- To develop and validate a novel CMOS-based detector for single electron sensitive real-time radiation monitoring.
- To address the unmet need for precise dosimetry in electron radiotherapy.
Main Methods:
- Development of a 0.05 mm³ CMOS chiplet integrating all necessary electronics.
- Verification of detector functionality using 6 and 9 MeV clinical electron beams.
- Measurement and Monte Carlo simulation of percentage depth vs. pulse-width curves.
Main Results:
- Demonstrated functionality of the single electron sensitive detector under clinical electron beams.
- Accurate measurement of percentage depth vs. pulse-width curves validated by simulations.
- Successful integration of electronics within a compact chiplet design.
Conclusions:
- The developed CMOS-based detector offers real-time, single-particle level radiation monitoring capabilities.
- This technology has the potential to significantly improve the quality and safety of electron radiotherapy.
- Enables simultaneous real-time dosimetry from multiple locations, enhancing treatment precision.
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