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Updated: May 10, 2025

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Low Noise Feed-Through Compensation Circuit Design for Resonant MEMS Pressure Sensor

Jialuo Liao1, Pinghua Li1, Jiaqi Miao1

  • 1College of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China.

Micromachines
|April 26, 2025
PubMed

Keywords:
charge amplifierfeed-through effectnoise optimizationresonant pressure sensor

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