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All-Hydrocarbon Low-Dielectric Loss Benzocyclobutene-Encapsulated Photoresist with High Pattern Resolution

Hanlin Du1, Hongyan Xia2, Yun Tang1,3

  • 1School of Materials and Chemistry and State Key Laboratory of Environmentally-Friendly Energy Materials, Southwest University of Science and Technology, Mianyang 621010, China.

ACS Omega
|April 28, 2025
PubMed

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Cycloheptatriene is a neutral monocyclic unsaturated hydrocarbon that consists of an odd number of carbon atoms and an intervening sp3 carbon in the ring. The three double bonds in the ring correspond to 6 π electrons, which is a Huckel number, and therefore satisfies the criteria of 4n + 2 π electrons. However, the intervening sp3 carbon disrupts the continuous overlap of p orbitals. As a result, cycloheptatriene is not aromatic.
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