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Updated: May 22, 2025

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
Published on: January 27, 2017
Yuxiang Yin1, Bingyan Liu1, Yanru Chen2
1School of Physical Science and Technology, ShanghaiTech University, 393 Middle Huaxia Road, Shanghai 201210, China.
Faraday lithography (FL) offers a novel solution for nanoscale 3D printing and nanofabrication, achieving 35 nm features with high precision. This simple, versatile technique overcomes limitations of conventional photolithography for semiconductor nanomanufacturing.
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