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Novel Focused Ion Beam Techniques for Enhanced Sample Preparation for In Situ Transmission Electron Microscopy

Kerui Wei1, Matthew Lindley2, Xuzhao Liu2

  • 1Henry Royce Institute, University of Manchester, Oxford Road, Manchester M13 9PL, UK.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|May 9, 2025
PubMed

Keywords:
in situ transmission electron microscopy (TEM)contaminationfocused ion beam (FIB)ion beam-induced deposition (IBID)ion irradiationredepositionsilicon carbide

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