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Updated: Jun 15, 2025

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Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
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High-order mode suppression in a high-Q disk resonator with metal patterning
Optics Letters
|June 13, 2025
Summary
We developed a novel microdisk resonator (MDR) using a patterned nickel layer to suppress unwanted modes. This silicon photonics innovation achieves a high-quality (Q) factor of 1.5 × 10^5, significantly improving light confinement.
Area of Science:
- Photonics
- Materials Science
- Optical Engineering
Background:
- High-quality (Q) resonators are crucial for silicon photonics, but conventional microring resonators (MRRs) and microdisk resonators (MDRs) suffer from high losses and mode interference.
- Existing designs struggle to balance high Q-factors with clean spectral responses.
Purpose of the Study:
- To introduce a novel microdisk resonator (MDR) design that overcomes the limitations of conventional resonators.
- To achieve a high Q-factor and a clean spectral response simultaneously using a patterned metal layer.
Main Methods:
- Integration of a patterned nickel (Ni) metal layer onto a conventional MDR.
- Utilizing the optical absorption properties of the Ni layer to selectively suppress high-order modes.
- Experimental characterization of the patterned MDR's performance.
Main Results:
- The patterned MDR achieved a high Q-factor of 1.5 × 10^5, two orders of magnitude higher than comparable MRRs.
- A maximum extinction ratio of 31 dB was recorded for a 20 μm radius patterned MDR.
- The design successfully combined a high Q-factor with a clean spectral response.
Conclusions:
- The novel patterned MDR design effectively suppresses high-order modes, leading to significantly enhanced Q-factors.
- This approach offers a promising solution for high-Q resonators in chip-scale photonic systems.
- The integrated Ni layer provides a pathway for improved performance in silicon photonics applications.
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