Low-cost 3D-printed mask system for versatile selective sample deposition on in situ TEM chips

Area of Science:

• Materials Science
• Nanotechnology
• Electron Microscopy

Background:

• In situ liquid electron microscopy enables nanoscale dynamic process studies.
• Selective sample deposition on microelectromechanical systems (MEMS) biasing chips is challenging due to small window areas and electrode design.
• Difficulties are amplified for solvent-dispersed or physically vapor-deposited samples.

Purpose of the Study:

• To develop a simple, low-cost method for controlled sample deposition on MEMS chips for in situ liquid electron microscopy.
• To overcome limitations in sample preparation for dynamic nanoscale studies.

Main Methods:

• A 3D-printed loading stage with an integrated mask system was designed and fabricated.
• The stage facilitates controlled deposition of various sample types onto MEMS chips.

Main Results:

• Successful deposition of AuPdPt nanoparticles from liquid suspension was achieved.
• Sputtered Au clusters and a cluster-based Au thin film were effectively deposited.
• The method demonstrated controlled deposition onto the working electrode of MEMS chips.

Conclusions:

• The proposed 3D-printed loading stage offers a straightforward and accessible solution for sample preparation in in situ liquid electron microscopy.
• The design is adaptable to diverse MEMS in situ chips and sample types, enhancing research accessibility.
• This innovation simplifies the study of nanoscale dynamic processes.