Biaxial Non-Resonant Electromagnetically Driven Scanning Micromirror with Large Aperture.

Area of Science:

• Optoelectronics
• MEMS (Micro-Electro-Mechanical Systems)

Background:

• Existing scanning micromirrors face limitations in aperture size, scanning angles, and fabrication costs.
• There is a need for improved scanning micromirror technology for applications like LiDAR and optical communication.

Purpose of the Study:

• To propose and demonstrate a large-aperture biaxial electromagnetically driven scanning micromirror.
• To overcome the limitations of current scanning micromirror designs.

Main Methods:

• Designed a scanning micromirror with a stainless-steel mirror and an actuation structure using permanent magnets (NdFeB 52), iron cores, and copper coils.
• Optimized magnet layout and coil design for biaxial non-resonant scanning.
• Fabricated the device using computer numerical control (CNC) milling.

Main Results:

• Achieved large optical scanning angles of 61.4° (x-axis) and 61.1° (y-axis) with a 9.54 mm × 10 mm aperture.
• Demonstrated biaxial independent control in non-resonant scanning mode.
• Measured resonant frequencies of 89 Hz (x-axis) and 63 Hz (y-axis).

Conclusions:

• The proposed large-aperture biaxial scanning micromirror effectively addresses limitations of existing designs.
• The low-cost CNC fabrication and achieved performance show significant application potential in LiDAR, projection display, and optical communication.
• This work provides a novel approach for optimizing large-aperture scanning micromirror performance.