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High-Efficiency Cladding-Free Thermo-Optic Modulators via 1T'-MoTe2/Silicon Waveguides.

Zilan Tang1, Hui Wang1, Honglin Wang1

  • 1Hunan Institute of Optoelectronic Integration and Key Laboratory for MicroNano Physics and Technology of Hunan Province, State Key Laboratory of Chemo/Biosensing and Chemometrics, College of Materials Science and Engineering, Hunan University, Changsha 410082, P. R. China.

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Summary

This study introduces a novel thermo-optic Mach-Zehnder modulator (TO-MZM) using 1T'-MoTe2/silicon hybrid waveguides. This design offers high efficiency and low optical loss for silicon photonics, advancing optical communication and sensing.

Keywords:
CMOS compatibilityMach−Zehnder modulatorin situ fabricationlarge-scale 1T′-MoTe2 filmsilicon waveguidethermo-optic effect

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Area of Science:

  • Photonics and Optoelectronics
  • Materials Science
  • Integrated Optics

Background:

  • Silicon photonics relies on efficient optical modulators for communication and sensing.
  • Conventional thermo-optic modulators face trade-offs between thermal efficiency and optical loss.
  • Existing designs using metallic or graphene heaters have limitations in scalability and performance.

Purpose of the Study:

  • To develop a high-efficiency thermo-optic Mach-Zehnder modulator (TO-MZM) using 1T -MoTe2/silicon hybrid waveguides.
  • To overcome the limitations of conventional TO modulators, particularly in thermal efficiency and optical loss.
  • To demonstrate a scalable and CMOS-compatible solution for next-generation optical modulators.

Main Methods:

  • Fabrication of 1T -MoTe2/silicon hybrid waveguides on silicon-on-insulator (SOI) substrates.
  • In situ integration of 1T -MoTe2 films for improved thermal transfer.
  • Characterization of modulator performance at a 1550 nm telecommunication wavelength.

Main Results:

  • Achieved a heating efficiency of 82.73 K·μm3/mW.
  • Demonstrated an optimized phase-tuning efficiency of 0.396 π·mW-1 with low optical loss.
  • Successfully implemented the modulator in a 16-channel optical phased array for 30° beam steering.

Conclusions:

  • The 1T -MoTe2/silicon hybrid waveguide TO-MZM offers superior performance compared to existing electrically controlled TO-MZMs.
  • The design provides a scalable, energy-efficient solution for advanced optoelectronic systems, including LiDAR.
  • This work paves the way for next-generation silicon photonic devices with enhanced functionality and efficiency.