Spherical surface reconstruction method based on a postural error compensation algorithm.

Area of Science:

• Optical engineering
• Metrology

Background:

• Spherical optical surface testing is prone to residual postural errors due to deviations from the ideal confocal position.
• These errors, including tilt and defocus, impact the accuracy of surface reconstruction.

Purpose of the Study:

• To design and validate a compensation algorithm for high-precision spherical surface reconstruction.
• To address and mitigate tilt and defocus errors inherent in optical testing.

Main Methods:

• Development of a compensation algorithm capable of real-time detection and deduction of tilt and defocus errors.
• Utilizing both simulation and experimental validation to assess the algorithm's performance.

Main Results:

• The proposed algorithm significantly enhances the accuracy of spherical surface reconstruction compared to traditional Zernike fitting.
• Demonstrated effective suppression of composite postural errors during optical path adjustment.

Conclusions:

• The developed compensation algorithm offers a superior approach for accurate spherical surface testing.
• This method provides a robust solution for minimizing errors in optical metrology and reconstruction.