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Interleaved resistive micro-heater for switching phase-change materials integrated in silicon photonics
Applied Optics
|August 12, 2025
Summary
We developed a novel electrical switching method for phase-change material (PCM) photonic devices using a unique micro-heater design. This approach enhances efficiency and device longevity for reconfigurable photonic integrated circuits.
Area of Science:
- Photonics
- Materials Science
- Electrical Engineering
Background:
- Phase-change materials (PCMs) offer non-volatile control over optical properties, crucial for advanced photonic integrated circuits (PICs).
- Existing micro-heater designs for PCM switching face limitations in efficiency and device lifetime.
- Applications include photonic switching, RF photonics, and optical information processing.
Purpose of the Study:
- To demonstrate a new electrical switching approach for PCMs in photonic devices.
- To overcome limitations of current micro-heater designs for PCM switching.
- To enable ultra-low power, reconfigurable, and compact PICs.
Main Methods:
- Developed an interleaved resistive micro-heater structure for electrical switching of PCMs.
- Fabricated a proof-of-concept device using a commercial silicon photonics foundry and post-processing.
- Utilized coarse-resolution laser-writing lithography for fabrication.
Main Results:
- Achieved an amplitude switching contrast of 0.775 dB/µm.
- Employed a thin layer (12.5 nm) of GST (Germanium-Antimony-Tellurium).
- Demonstrated an efficient switching mechanism with potential for increased PCM lifetime by eliminating current through the PCM.
Conclusions:
- The novel micro-heater design provides an efficient and potentially longer-lasting method for electrical switching in PCM-based photonic devices.
- This technique facilitates the development of highly reconfigurable and compact photonic integrated circuits.
- The fabrication process is compatible with commercial silicon photonics foundries and requires minimal steps.

