Optical measurement and manufacture at the Shanghai Synchrotron Radiation Facility

The Optics Group at the Shanghai Synchrotron Radiation Facility (SSRF) specializes in optical component metrology and fabrication. Established alongside the SSRF phase I beamline construction, the optical metrology laboratory is equipped with a 1D-scanning Long Trace Profiler (LTP), laser interferometers, white light interferometers, and atomic force microscopes. This instrumentation enables characterization of surface errors across high, medium, and low spatial frequency domains. During SSRF phase II, the group developed a novel 3D Long Trace Profiler (3D LTP) capable of acquiring 3D surface topography in a single scan. Furthermore, the group has made significant breakthroughs in fabricating synchrotron radiation grazing-incidence mirrors, achieving a 1000-mm-long mirror with a slope error of <200 nrad and a 400-mm-long mirror with a height error of <2 nm (PV).