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High precision 3D optical detection technology based on shear interferometry with arbitrarily shear amounts.

Yuqin Wang, Liuliu Li, Penghao Liao

    Optics Express
    |August 13, 2025
    PubMed
    Summary
    This summary is machine-generated.

    A novel 3D shape reconstruction algorithm for optical defects overcomes duplicate image issues in shear interferometry. This method allows arbitrary shear adjustments, simplifying optical testing devices and reducing costs.

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    Area of Science:

    • Optical Engineering
    • Metrology
    • Surface Characterization

    Background:

    • Differential interferometry offers high contrast but requires complex optical elements for shear.
    • Existing methods struggle with adjustable shear amounts and directions, limiting flexibility.
    • The
    • duplicate image
    • problem persists in conventional shear interferometry.

    Purpose of the Study:

    • To propose a novel 3D shape reconstruction algorithm for optical defects.
    • To enable arbitrary shear amounts and directions in shear interferometry.
    • To simplify optical testing systems and reduce costs.

    Main Methods:

    • Developed a 3D shape reconstruction algorithm based on shear interference.
    • Employed an iterative phase addition approach to resolve duplicate images.
    • Utilized image interpolation to handle large gradient defects and phase ambiguity.

    Main Results:

    • Successfully reconstructed 3D morphology of surface irregular defects with arbitrary shear.
    • Achieved a maximum reconstruction error as low as 10-11 m.
    • Designed a simplified optical testing system using a mirror for shear adjustment, eliminating extra optical elements.

    Conclusions:

    • The proposed algorithm effectively reconstructs 3D defect morphology with high accuracy.
    • The simplified optical testing system demonstrates feasibility and cost-effectiveness.
    • This method overcomes limitations of traditional differential interferometry for optical defect analysis.