Development of the Stitching-Oblique Incidence Interferometry Measurement Method for the Surface Flatness of...

With the increasing demand for high-performance ceramic guideways in precision industries, accurate flatness measurement of large-scale, rough ceramic surfaces remains challenging. This paper proposes a novel method combining oblique-incidence laser interferometry and sub-aperture stitching to overcome limitations of conventional techniques. The oblique-incidence approach enhances interference signal strength on low-reflectivity surfaces, while stitching integrates high-resolution sub-aperture measurements for full-surface characterization. Numerical simulations validated the method's feasibility, showing consistent reconstruction of surfaces with flatness values of 1-20 μm. Experimental validation on a 1050 mm × 130 mm SiC guideway achieved a full-surface measurement with PV 2.76 μm and RMS 0.59 μm, demonstrating high agreement with traditional methods in polished regions. The technique enabled quick monitoring of a 39-h lapping process, converging flatness from 13.97 μm to 2.76 μm, proving its efficacy for in-process feedback in ultra-precision manufacturing.