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    Area of Science:

    • Materials Science and Engineering
    • Acoustics and Ultrasonics
    • Biomedical Engineering

    Background:

    • Micromachined ultrasonic transducers (PMUTs) are crucial for miniaturized sensing systems.
    • Photoacoustic (PA) sensing offers high resolution and sensitivity.
    • Integrating PMUTs with lasers enables compact PA devices.

    Purpose of the Study:

    • To develop and characterize a miniaturized PA sensing system using a high-fill-factor PMUT array and a VCSEL.
    • To investigate the critical parameters for optimizing PA system performance.
    • To validate the system's feasibility for portable PA applications.

    Main Methods:

    • Fabrication of a PMUT array using the cavity silicon-on-insulator (CSOI) process.
    • Integration of the PMUT array with a compact VCSEL to form a PA sensing system.
    • Comprehensive characterization including electrical impedance, acoustic response, PA bandwidth, and phantom testing.

    Main Results:

    • The PMUT array exhibited a center frequency of 4.89 MHz (air) and 3.5 MHz (couplant) with a -6-dB PA bandwidth of 146%.
    • The miniaturized PA system (4.6 mm × 2.0 mm × 5.2 mm) demonstrated distortion-free, high-fidelity signal detection at close range.
    • Optimized VCSEL parameters (28-ns pulsewidth, 63.6 μW average power) and demonstrated multidepth phantom signal acquisition.

    Conclusions:

    • The CSOI process enables high-fill-factor PMUT fabrication with broadband capabilities.
    • The developed compact PA system is suitable for close-range sensing and portable applications.
    • System optimization and understanding of laser-PMUT interaction are critical for signal integrity.