A new, ultra-stable lab for nano-metrology of x-ray optics at Diamond Light Source

A new Optics Metrology Laboratory for assembling and characterizing beamline x-ray optical systems has been built. This replaces the old laboratory, which was demolished to make space for construction of a new flagship beamline for the forthcoming Diamond-II facility upgrade. The new cleanroom laboratory is located between several beamlines and laboratories, which intermittently generate significantly higher levels of acoustic noise and floor vibrations. A threefold design strategy was employed to create an ultra-stable environment for the sensitive, optical metrology instruments. First, the walls, ceiling and doors of the laboratory were constructed to attenuate acoustic noise. Second, the air handling systems were designed to minimize self-production of noise and vibrations. Finally, engineering solutions were developed to further isolate the metrology instruments from environmental fluctuations. Overall, despite higher levels of external disturbances, this strategy enables nano-metrology to be successfully conducted in the new laboratory. The shielded environment around each instrument achieves noise rating NR30, which is 5-25 dB quieter than the old laboratory. Over 60-h, the temperature inside the Diamond-NOM's enclosure varied by only 0.004 °C rms, and humidity changed by <1% RH. All optical metrology instruments are now performing better than in the old laboratory: the slope error repeatability of Diamond-NOM is improved from 15 to 9 nrad rms; the GTX micro-interferometer has measured super-polished substrates with micro-roughness <40 pm rms; the new gantry for Speckle Angular Measurement is commissioned; and the HDX Fizeau interferometer has measured mirrors with slope errors <50 nrad.