Controlled synthesis of two-dimensional porous molybdenum nitride via a stepwise nitridation growth mechanism

Transition metal nitrides exhibit desirable performance in various fields such as catalysis and energy storage due to their noble-metal-like properties. However, the controllable synthesis of two-dimensional (2D) planar metal nitrides with well-defined surfaces remains a challenge. Here, we report the controlled construction of molybdenum nitride model structures through stepwise nitridation using (NH₄)₆Mo₇O₂₄ as the precursor via chemical vapor deposition combined with a vapor-solid-solid (VSS) growth mechanism. Scanning electron microscopy (SEM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS) confirmed the successful fabrication of a well-ordered, 2D planar porous γ-Mo₂N model structure on Al₂O₃(0001) substrates. By optimizing growth conditions, we achieved controllable synthesis of material morphology and structure. Raman spectroscopy analysis revealed that the prepared γ-Mo₂N surface is rich in active sites, demonstrating significant interactions with adsorbed oxygen-containing small molecules, which confirms its excellent surface reactivity. This study provides a novel strategy for preparing model structures of transition metal nitrides and elucidates the critical role of the VSS mechanism in nitride thin film growth.