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Updated: Jan 10, 2026

Optimized Fabrication Procedure for High-Quality Graphene-based Moiré Superlattice Devices
Published on: July 11, 2025
Laser Annealing of Fluorine-Doped Graphene Enables Precise Wettability Control and Its Application in Integrated
Huilong Liu1, Litian Gan1, Zimin Chen1
1State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China.
None:
Graphene films with tunable wettability exhibit great potential in energy storage, sensing, and microfluidics. However, achieving precise control over their hydrophilic/hydrophobic properties remains a critical challenge. Herein, we develop a two-step laser processing method for ambient-air fabrication of fluorine-doped graphene (F-LIG) films with tunable wettability. The method involves picosecond UV laser pyrolysis of fluorinated ethylene propylene (FEP)/polyimide (PI) films followed by CO2 laser annealing of the resultant F-LIG films. The formation mechanisms were clarified through microstructure and chemical characterizations and molecular dynamics simulation. Results demonstrate that the UV laser induces a transient high-temperature/pressure environment at the FEP/PI interface, facilitating fluorine diffusion and C-F covalent bonding to yield superhydrophobic F-LIG. Subsequent laser annealing reconstructs the carbon lattice, removes unstable fluorine residues, regulates oxygen-containing groups, and constructs through-pores. This annealing process achieves nearly linear wettability tuning from superhydrophobicity (160.2°) to near-superhydrophilicity (15.4°) by modulating surface energy. Moreover, the near-superhydrophilic F-LIG demonstrates excellent conductivity and capacitive performance (8.9 mF/cm2) in microcapacitors, enabling integrated applications. Significantly, all integrated microcapacitors spanning 1 to 30 cells maintain excellent performance consistency and scalable series-parallel performance. This work provides an approach for the efficient processing of graphene with on-demand wettability engineering and monolithic integration of energy storage.

