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Related Concept Videos

MOS Capacitor01:25

MOS Capacitor

A Metal-Oxide-Semiconductor (MOS) capacitor is a fundamental structure used extensively in semiconductor device technology, particularly in the fabrication of integrated circuits and MOSFETs (metal-oxide-semiconductor field-effect transistors). The MOS capacitor consists of three layers: a metal gate, a dielectric oxide, and a semiconductor substrate.
The metal gate is typically made from highly conductive materials such as aluminum or polysilicon. Beneath the metal gate lies a thin layer of...

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A Computer Numerical Control Wire Electrical Discharge Machining Strategy for Fabricating Cobalt-Copper Bimetallic

Ziliang Chen1, Rui Xie1, Chunlong Chen1

  • 1School of Electromechanical Engineering, Guangdong Polytechnic Normal University, Guangzhou 510450, China.

Micromachines
|May 27, 2026
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Summary

Researchers developed oxygen-vacancy-modified cobalt-copper bimetallic oxide micro-supercapacitors (MSCs) using a novel CNC-WEDM method. This technique enhances conductivity and performance for advanced micro-electronic applications.

Keywords:
CoCuOxbinder-freecomputer numerical controlmicro-supercapacitoroxygen vacancywire electrical discharge machining

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Area of Science:

  • Materials Science
  • Electrochemistry
  • Nanotechnology

Background:

  • Cobalt-copper bimetallic oxides (CoCuOx) are promising for micro-supercapacitors (MSCs).
  • Poor conductivity and complex synthesis hinder their application in micro-electronics.
  • Oxygen vacancies can enhance electrochemical properties.

Purpose of the Study:

  • To fabricate high-performance, binder-free CoCuOx-based MSCs using a novel method.
  • To address the limitations of poor conductivity and complex preparation of CoCuOx materials.
  • To investigate the influence of geometric shape and machining voltage on MSC performance.

Main Methods:

  • A one-step computer numerical control wire electrical discharge machining (CNC-WEDM) strategy was employed.
  • Oxygen-vacancy-modified CoCuOx-based binder-free electrodes were fabricated.
  • Theoretical simulations were used to study the effect of geometric shape on capacitive behavior.

Main Results:

  • Maze-like CoCuOx MSCs (CoCuMMSCs) with designable electrochemical performance were successfully fabricated.
  • The CoCuMMSCs achieved a maximum capacitance of 32.8 mF cm-2 at 0.15 mA cm-2 with optimal machining voltage (100 V).
  • Outstanding performance was demonstrated at ultrahigh scan rates (up to 50,000 mV s-1).

Conclusions:

  • The CNC-WEDM technique offers an efficient pathway for fabricating high-performance CoCuMMSCs.
  • The method leverages oxygen-vacancy incorporation, synergistic oxide effects, and binder-free design.
  • This strategy advances the development of micro-electronic devices like MSCs, micro-sensors, and micro-batteries.