Design and Modeling of a 2-DOF Micro-Positioning Stage for Vibration-Assisted Polishing.

Area of Science:

• Mechanical Engineering
• Precision Engineering
• Materials Science

Background:

• Vibration-assisted polishing requires precise micro-positioning stages.
• Existing stages face challenges with limited working stroke, accuracy, and response time.
• Piezoelectric actuators offer high resolution but have restricted displacement.

Purpose of the Study:

• To propose a novel two-degree-of-freedom (2-DOF) micro-positioning stage for vibration-assisted polishing.
• To address limitations of insufficient working stroke, low accuracy, and response time.
• To enhance the performance of stages used in precision manufacturing.

Main Methods:

• Design of a bridge-lever amplification mechanism to magnify piezoelectric actuator displacement.
• Static modeling using Castigliano's second theorem and elastic beam theory.
• Derivation of analytical models and validation via finite element simulations.

Main Results:

• The proposed stage achieves kinematic decoupling and excellent dynamic performance.
• Analytical models were validated with a low error of 4.6% compared to simulations.
• The bridge-lever mechanism effectively compensates for limited piezoelectric actuator stroke.

Conclusions:

• The developed 2-DOF micro-positioning stage offers a viable solution for vibration-assisted polishing.
• The design provides insights for creating large-stroke, piezo-actuated stages with superior dynamic characteristics.
• This research contributes to advancements in precision engineering for polishing applications.