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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Molecularly Thin Polyaramid Nanomechanical Resonators
Hagen Gress1, Cody L Ritt2, Inal Shomakhov1
1Department of Mechanical Engineering, Division of Materials Science and Engineering, and the Photonics Center, Boston University, Boston, Massachusetts 02215, United States.
Abstract:
Two-dimensional polyaramids exhibit strong hydrogen bonding to create molecularly thin nanosheets analogous to graphene. Here, we report the first nanomechanical resonators made out of a two-dimensional polyaramid, 2DPA-1, with thicknesses as small as 8 nm. To fabricate these molecular-scale resonators, we transferred nanofilms of 2DPA-1 onto chips with previously etched arrays of circular microwells. We then characterized the thermal resonances of these resonators under different conditions. When there is no residual gas inside the 2DPA-1-covered microwells, the eigenfrequencies are well-described by a tensioned plate theory, providing the Young's modulus and tension of the 2DPA-1 nanofilms. With gas present, the nanofilms bulge up and mechanical resonances are modified due to the adhesion, bulging and slack present in the system. The fabrication and mechanical characterization of these first 2DPA-1 nanomechanical resonators represent a convincing path toward molecular-scale polymeric NEMS with high mechanical strength, low density, and synthetic processability.

