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High-speed Particle Image Velocimetry Near Surfaces

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A 326,000 fps 640 × 480 Resolution Continuous-Mode Ultra-High-Speed Global Shutter CMOS BSI Imager.

Jean-Luc Bacq¹, Mandar Thite¹, Roeland Vandebriel¹

¹IMEC, 3001 Heverlee, Belgium.

Sensors (Basel, Switzerland)

|December 11, 2025

Summary

This study presents an ultra-high-speed CMOS image sensor for continuous motion capture at 326,000 fps. Novel pixel and circuit designs enable high frame rates and accurate global shutter performance.

Keywords:

CMOS image sensor backside illumination continuous recording global shutter ultra-high-speed

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Area of Science:

Electronics
Image Sensors
Semiconductor Devices

Background:

High-speed imaging demands advanced sensor technology.
Existing sensors face limitations in frame rate and shutter accuracy.
Continuous motion capture requires rapid and precise data acquisition.

Purpose of the Study:

To develop an ultra-high-speed monolithic global shutter CMOS image sensor.
To achieve continuous motion capture at 326,000 frames per second (fps).
To enhance performance through novel pixel and circuit techniques.

Main Methods:

Utilized a highly sensitive Back-Side Illuminated (BSI) pixel with a fully depleted substrate.
Implemented in-pixel voltage mode storage for pipelined readout.
Employed in-pixel analog Correlated Double Sampling (CDS) for low noise.
Achieved a 6.4 ns equivalent row time using parallel ADCs and dual readout.
Ensured global shutter accuracy with independent row drivers and a 59 ns minimum exposure time.
Enhanced dynamic range via on-chip Fixed Pattern Noise (FPN) reduction and PTC-based data compression.

Main Results:

Demonstrated continuous motion capture at 326,000 fps with 640 × 480 resolution.
Achieved a sensor throughput of 100 Gigapixels/sec.
Transferred data off-chip using 128 CML channels at 6.6 Gbps each.
Fabricated using a 130 nm monolithic CMOS Image Sensor (CIS) process with BSI postprocessing.

Conclusions:

The developed sensor enables unprecedented ultra-high-speed continuous motion capture.
The novel design overcomes previous limitations in frame rate and shutter performance.
The sensor is suitable for demanding applications requiring high-speed imaging and is in series production.