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Updated: Jul 30, 2026

Insertion of Flexible Neural Probes Using Rigid Stiffeners Attached with Biodissolvable Adhesive
Published on: September 27, 2013
Structure-Property Modulation in Pyrolytic Photoresist Films Enabled Size-Dependent Electrochemical Performance of
Junke Wang1, Huidi Liu1, Wenwei Wu1
1Institute of Microelectronics and Integrated Circuits, School of Microelectronics, Hubei University, Wuhan 430062, China.
Abstract:
Neural probes are critical devices used to monitor and record brain activity, usually connected to neurons to measure neural activity. However, traditional metal electrodes face numerous challenges, including high Young's modulus, susceptibility to electromagnetic interference, insufficient biocompatibility, and the risk of corrosion and delamination. In this study, we explore a highly biocompatible carbon material, a pyrolytic photoresist film (PPF), developed through a photoresist pyrolysis process. The effects of the pyrolysis temperature and hold time on material properties were systematically studied. The optimal pyrolysis condition was identified as 1000 °C for 2 h. Furthermore, a quantitative model was established to link the electrode's geometric area with electrochemical performance and optimize the performance of PPF neural probes. Ultimately, we successfully fabricated a multichannel flexible neural probe with superior electrochemical performance.
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