Nonlinear dynamics of in-plane ring resonator for mass sensing

Area of Science:

• Mechanical Engineering
• Nanotechnology
• Sensor Technology

Background:

• Microelectromechanical systems (MEMS) are vital for sensitive mass detection in environmental, medical, and chemical applications.
• Fluid damping significantly degrades the quality factor and sensitivity of traditional MEMS mass sensors.
• Cantilever-based sensors often suffer from high damping in translational out-of-plane modes.

Purpose of the Study:

• To present a rotating ring resonator for enhanced mass sensing.
• To investigate the nonlinear dynamics and bifurcation behavior of the proposed resonator.
• To demonstrate improved performance metrics like lower damping and higher quality factor.

Main Methods:

• Designing and modeling a rotating ring resonator supported by slender beams.
• Subjecting the structure to rotational base excitation.
• Analyzing nonlinear dynamics and bifurcation points on the frequency response curve.

Main Results:

• The rotating ring resonator exhibits lower damping and a higher quality factor compared to cantilever sensors.
• Mass detection is achieved by observing shifts in nonlinear bifurcation points.
• Nonlinear resonance zones in the superharmonic regime enable mass detection at specific fractions of the primary resonance.
• Linear regime mass detection is also possible via resonance frequency shifts.

Conclusions:

• The rotating ring resonator offers a promising platform for sensitive mass sensing with improved performance.
• Utilizing nonlinear dynamics provides a novel approach for mass detection with enhanced sensitivity.
• The in-plane rotational mode design effectively minimizes damping for superior sensor operation.