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    Area of Science:

    • Optical Microscopy
    • Nanotechnology
    • Image Processing

    Background:

    • Confocal microscopy faces a resolution-speed tradeoff.
    • Digital micromirror devices (DMDs) offer advanced illumination control.

    Purpose of the Study:

    • To enhance resolution and imaging speed in confocal microscopy.
    • To develop a method for artifact-free isotropic resolution enhancement.
    • To improve micro-nano structure topography inspection efficiency.

    Main Methods:

    • Orthogonal Multi-Line Pixel Reassignment (OML-PR) using a DMD.
    • High-density orthogonal multi-line-structured illumination for parallel lateral scanning.
    • 3D coordinated continuous axial scanning.
    • Gradient-guided reassignment mechanism for artifact-free resolution enhancement.

    Main Results:

    • Achieved 137 nm lateral resolution with a 100×/0.90 NA objective at 455 nm wavelength.
    • Successfully detected 98 nm gap defects and 48 nm bridge defects.
    • Completed full 3D scans in under 3 seconds.

    Conclusions:

    • OML-PR method significantly enhances acquisition efficiency and resolution in confocal microscopy.
    • The technique enables high-quality reconstruction and efficient inspection of micro-nano structures.
    • Demonstrates a viable approach to overcome the resolution-speed limitations in advanced imaging.