Transparent Multifunctional MXene/InGaTiO Films for Broadband Electromagnetic Interference Shielding, Temperature...

The advancement of next-generation multifunctional integrated electronic devices necessitates the development of thin films that exhibit high optical transmittance, effective electromagnetic interference (EMI) shielding performance, mechanical flexibility, sensing, and heating capabilities. Herein, we report the fabrication and characterization of highly conductive MXene/indium-gallium-titanium oxide (IGTO) thin films, in which IGTO is uniformly deposited on the MXene surface using a room-temperature plasma damage-free sputtering process. This passivated IGTO layer effectively prevents MXene degradation. The best-performing MXene/IGTO 300 nm film exhibits a low sheet resistance of 24.2 Ω sq^-1, a high transmittance of 73.2 %, and an X-band EMI shielding effectiveness of >25.12 dB, which exceeds that of a pristine few-layer MXene film by 21.23 dB. Moreover, the hybrid film demonstrates robust multifunctionality, as exemplified by its mechanical flexibility, high Joule-heating, and temperature-sensing performances. These results highlight the high potential of transparent MXene/IGTO films for applications in smart windows and wearable electronic systems.