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Updated: Jan 7, 2026

A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy
Published on: April 8, 2018
Large-Area Polymorphic In2Se3 Ferroelectric Transistor Array for Stable Nonvolatile Storage and High-Precision
Yuhuan Li1, Xiaodong Zheng2, Wen Zhang1
1Department of Applied Physics, The Hong Kong Polytechnic University, Kowloon, Hong Kong, China.
Abstract:
2D ferroelectric field-effect transistors (FeFETs) are expected to be a practical solution for next-generation in-memory computing, seamlessly integrating with computer hardware architectures to overcome the von Neumann bottleneck. At present, emerging 2D materials are driving chip miniaturization. Among them, In2Se3 stands out, as both theoretical and experimental studies have confirmed its novel physical properties with practical applications. Notably, monolayer In2Se3 retains ferroelectricity at room temperature and exhibits high carrier field-effect mobility (µFE). Furthermore, it can be synthesized via chemical vapor deposition (CVD) as thin films, demonstrating strong potential for large-area 2D FeFET array. Here, we investigate the In2Se3 thin film FeFET array prepared by CVD, which has a µFE of 151.7 cm2 V-1 s-1 and an on-off ratio of up to 106. Inspiringly, the array exhibits stable, non-volatile characteristics, maintaining a high-to-low resistance state window of larger than 102 even after 1800 s. Furthermore, we explore its potential for neuromorphic computing by applying the array to machine learning tasks across various datasets and neural network architectures, consistently achieving a high 2D materials, ferroelectric, neuromorphic, polymorphic, transistor recognition accuracy greater than 90%.
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