Demolding Simulation of Propagation Phase Metasurfaces via Roll-to-Plate Nanoimprint

Area of Science:

• Metasurfaces and Nanofabrication
• Computational Modeling and Simulation
• Materials Science and Engineering

Background:

• Propagation phase metasurfaces offer advanced electromagnetic regulation and polarization insensitivity.
• Roll-to-plate nanoimprint lithography (R2P-NIL) is a promising technique for cost-effective, large-scale metasurface fabrication.
• Existing 2D simulations for R2P-NIL lack the fidelity to model elastomeric roller impacts and discrete metasurface structures.

Purpose of the Study:

• To develop a comprehensive 3D multiscale simulation model for the R2P-NIL demolding process.
• To investigate the influence of various process parameters on demolding stress and structural integrity.
• To provide theoretical guidance for optimizing R2P-NIL parameters for stable, large-scale metasurface manufacturing.

Main Methods:

• Established a 3D multiscale finite element method (FEM) model.
• Integrated macroscopic elastomeric roller deformation with a microscopic demolding stress model.
• Employed motion equation-based parameter transfer for multiscale coupling.

Main Results:

• Optimized elastomeric layer thickness minimizes demolding stress.
• Moderate roller radius disperses stress, while excessive pressure amplifies it.
• Microscopic parameters like resist elastic modulus and structure geometry significantly affect stress distribution and aspect ratio limits.

Conclusions:

• The 3D multiscale model accurately predicts demolding behavior in R2P-NIL for metasurfaces.
• Simulation results offer critical insights for optimizing R2P-NIL parameters, such as roller thickness, radius, pressure, and resist properties.
• This research facilitates the stable, large-scale production of high-performance propagation phase metasurfaces.