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Updated: Jan 20, 2026

Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate
Published on: September 28, 2019
Structural analysis of co-sputtered Cu-Nb and Cu-Pd textured thin films
Claudia Cancellieri1, Giacomo Lorenzin1, Yeliz Unutulmazsoy2
1Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratories for Joining Technologies and Corrosion, Überlandstrasse 129, 8600Dübendorf, Switzerland.
This study introduces a new model for analyzing nanoscale two-metal alloy films, crucial for understanding material properties. The model aids in characterizing the structural distribution of elements in sputtered copper thin films.
Area of Science:
- Materials Science
- Nanotechnology
- Thin Film Physics
Background:
- Characterizing nanoscale two-metal-phase systems with minority elements is challenging due to frozen disorder from co-sputtering.
- Accurate quantification of elemental distribution and internal disorder in such systems requires advanced analytical models.
- Understanding self-organization of elements within a matrix is key to controlling material properties.
Purpose of the Study:
- To present a novel model for describing the structural distribution of alloy elements in magnetron-sputtered copper (Cu) thin films.
- To analyze two contrasting cases: Cu films with immiscible Niobium (Nb) and alloy-forming Palladium (Pd).
- To compare X-ray diffraction (XRD) data with energy-dispersive X-ray spectroscopy (EDX) for elemental distribution analysis.
Main Methods:
- Development of a computational model to fit diffraction patterns from various geometries.
- Magnetron sputtering of copper thin films with minority elements (Nb and Pd).
- Analysis using X-ray diffraction (XRD) and energy-dispersive X-ray spectroscopy (EDX).
Main Results:
- The model successfully describes the structural distribution of alloy elements in Cu thin films.
- Contrasting behaviors observed for immiscible Nb and alloy-forming Pd within the Cu matrix.
- Validation of the model through comparison with EDX-derived elemental distribution.
Conclusions:
- The developed model provides a robust framework for structural characterization of complex nanoscale alloy systems.
- The study highlights the importance of considering element miscibility and thermodynamic properties in thin film design.
- This work advances the understanding and characterization of disordered alloy thin films for potential applications.
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