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Machine learning-based XANES analysis for predicting the local structure and valence in amorphous silicon suboxides
Yu Fujikata1,2, Hiroki Sugisawa2, Teruyasu Mizoguchi1
1Institute of Industrial Science, The University of Tokyo, Tokyo, 153-8505, Japan. fujikata@iis.u-tokyo.ac.jp.
Physical Chemistry Chemical Physics : PCCP
|January 23, 2026
Summary
This study introduces a machine learning model that predicts silicon suboxide
Area of Science:
- Materials Science
- Computational Chemistry
- Machine Learning
Background:
- Silicon suboxide (SiOx) exhibits tunable properties based on its composition, making it industrially relevant.
- Accurately correlating the atomistic structure of SiOx with its properties is challenging with traditional methods.
- Understanding SiOx requires quantitative analysis of its electronic valence and local atomic structure.
Purpose of the Study:
- To develop a machine learning model for predicting silicon atom valence state and Si-O radial distribution function from X-ray absorption near-edge structure (XANES) spectra.
- To establish a robust and experimentally viable framework for characterizing amorphous silicon suboxide materials.
Main Methods:
- Generated nine amorphous SiOx networks using molecular dynamics simulations.
- Calculated Si K-edge XANES spectra using first-principles calculations.
- Trained a deep neural network on the generated XANES spectra dataset.
Main Results:
- The deep neural network model accurately predicts local silicon valence state and Si-O radial distribution function from XANES spectra.
- Specific spectral regions were identified as crucial for valence state (near edge) and structural (higher energy) predictions.
- The model demonstrated robustness, maintaining high performance on composition-averaged spectra.
Conclusions:
- The developed machine learning approach enables direct extraction of electronic and structural information from XANES spectra of amorphous materials.
- This method overcomes a significant bottleneck in analyzing complex, multivalent amorphous systems.
- The framework facilitates accelerated development of SiOx-based functional materials by quantitatively characterizing composition-structure-property relationships.
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