Engineered PN MoS₂-Al₂O₃-Based Photodiode Device for High-Performance NIR LiDAR and Sensing Applications

Near-infrared (NIR) photodetectors are essential for LiDAR, optical communication, and sensing technologies requiring fast response and low power consumption. This work reports a PN photodiode incorporating a co-sputtered MoS₂-Al₂O₃ composite layer to enhance NIR photoresponse for LiDAR and environmental sensing applications. The composite layer improves device performance through defect passivation, dielectric screening, and modified carrier transport behavior. Under 100 mW·cm^-2 illumination at 4 V, the device delivers a photocurrent of 10 mA with a response time of 155 µs, corresponding to an approximately threefold (~300%) improvement compared to a reference structure. Spectral measurements show peak responsivity at 970 nm with extended sensitivity up to 1100 nm. These results indicate that embedding Al₂O₃ within the MoS₂ improves the MoS₂/Si interface and facilitates infrared photon absorption in the Si substrate, leading to enhanced vertical carrier collection and reduced recombination compared with conventional surface-passivated MoS₂/dielectric layers-based devices. The proposed device demonstrates a low-cost, broadband photodiode architecture suitable for eye-safe LiDAR and environmental monitoring applications.