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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Haonan Ma1, Shijie Zhao2, Xia Liu2
1School of Integrated Circuits and Electronics, MIIT Key Laboratory for Low-Dimensional Quantum Structure and Devices, Beijing Institute of Technology, Beijing 100081, China; Beijing Institute of Technology (Zhuhai), Zhuhai 519088, China.
No abstract available in PubMed .