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Intermediate Strain Rate Material Characterization with Digital Image Correlation
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Robust and accurate Ronchi lateral shearing interferometry with hybrid optimization.

Haoran Zhu, Runzhou Shi, Huiwen Liu

    Applied Optics
    |March 17, 2026
    PubMed
    Summary
    This summary is machine-generated.

    This study introduces a hybrid optimization algorithm (HOA) for robust Ronchi lateral shearing interferometry (LSI) wavefront measurements. The novel HOA improves accuracy by mitigating interference from higher-order diffraction beams in advanced lithography.

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    Area of Science:

    • Optical Metrology
    • Wavefront Sensing
    • Advanced Lithography

    Background:

    • Ronchi lateral shearing interferometry (LSI) is crucial for wavefront measurements in advanced lithography.
    • Accuracy is often compromised by interference from higher-order diffraction beams.

    Purpose of the Study:

    • To develop a novel hybrid optimization algorithm (HOA) for robust and accurate Ronchi LSI measurements.
    • To overcome limitations posed by higher-order diffraction beams.

    Main Methods:

    • A robust error function incorporating multiple interferograms was constructed.
    • A hybrid optimization algorithm combining particle swarm optimization (PSO) for global search and a nonlinear optimizer for refinement was employed.

    Main Results:

    • The proposed HOA demonstrated superior accuracy and robustness compared to existing methods.
    • Effective initial value estimation and iterative refinement led to precise demodulation results.

    Conclusions:

    • The novel HOA offers a significant advancement in Ronchi LSI wavefront measurement.
    • This method enhances the reliability of metrology for advanced lithography tools.