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Updated: Mar 19, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Checkerboarded spherical phase-based computational optical scanning holography
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Computational optical scanning holography (COSH) is a single-pixel imaging technique that projects structured interference fringes onto an object using a polarization-dependent spatial light modulator. A hologram is obtained by arranging the total transmitted or reflected light that is measured by a single-pixel detector. After numerical reconstruction of the hologram, three-dimensional imaging is available. However, conventional COSH requires a four-step phase-shifting method to suppress unwanted components, resulting in a long measurement time. To overcome this, we propose a method using a checkerboarded spherical phase distribution in COSH, which combines a binary checkerboarded phase and a spherical phase. This design allows four phase-shifted holograms to be recorded simultaneously through multiplexed diffraction, reducing measurement time to one-fourth. Numerical simulations and optical experiments are given to confirm the proposed method.

