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Advanced reusable SAW-based particulate matter sensor with microheater and porous microstructured filter membrane for
Faisal Nawaz1, Nuriddin Tavakkalov1, Keekeun Lee2,3
1Department of Electrical and Computer Engineering, Ajou University, Suwon, 16499, Republic of Korea.
Microsystems & Nanoengineering
|March 25, 2026
Summary
This study introduces a reusable surface acoustic wave sensor system for simultaneously detecting PM10 and PM2.5. The novel design integrates a porous membrane and microheater for efficient particle filtering and detachment, enabling sensor reuse.
Area of Science:
- Materials Science
- Sensor Technology
- Environmental Monitoring
Background:
- Particulate matter (PM) poses significant health risks, necessitating accurate and continuous monitoring.
- Existing PM sensors often lack reusability and simultaneous detection capabilities for different size fractions.
- Surface Acoustic Wave (SAW) devices offer high sensitivity for mass-based detection but require solutions for reusability.
Purpose of the Study:
- To develop a novel, reusable SAW-based sensor system for simultaneous and selective detection of PM10 and PM2.5.
- To integrate a porous microstructure membrane and an on-board microheater for particle separation and detachment.
- To validate the sensor's performance, sensitivity, and reusability for environmental monitoring applications.
Main Methods:
- Fabrication of a SAW resonator on a 128° YX LiNbO₃ substrate with a co-fabricated microheater.
- Integration of a porous microstructure membrane with specific pore sizes (3 µm and 11 µm) for selective PM2.5 and PM10 capture.
- Utilizing COMSOL simulations for thermal analysis and particle trajectory modeling.
- Developing multi-channel interface electronics for real-time frequency shift monitoring.
- Experimental testing in a vacuum chamber using PM10 and PM2.5 dust, followed by microheater-induced particle detachment.
Main Results:
- The SAW sensor system demonstrated high sensitivity and selective detection for both PM10 and PM2.5.
- The integrated microheater successfully detached captured particles at ~100°C, enabling sensor recovery to baseline levels.
- The porous membrane effectively filtered particles based on size, allowing for distinct detection channels.
- The system proved reusable over multiple detection and detachment cycles under vacuum conditions.
Conclusions:
- The developed SAW-based sensor system offers a promising solution for reusable, simultaneous, and selective monitoring of PM10 and PM2.5.
- The integration of a porous membrane filter and microheater is key to achieving sensor reusability.
- This technology has the potential to improve the cost-effectiveness and sustainability of air quality monitoring networks.
