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CMOS-EMBEDDED MICROFLUIDICS FOR CHANNEL-ADDRESSABLE PARALLEL READOUT OF SPAD FLUORESCENCE LIFETIME SENSORS.

Max S Ladabaum1, Alexander Di1, Julian M Bao1

  • 1University of California, Berkeley.

Proceedings. IEEE International Conference on Micro Electro Mechanical Systems
|March 26, 2026
PubMed
Summary
This summary is machine-generated.

This study integrates microfluidics with single-photon avalanche diode sensors for parallel biosensing. This innovation enables scalable, addressable, and multiplexed lab-on-CMOS devices.

Keywords:
BiosensorCMOSFluorescence lifetimeLab-on-ChipSPADSubtractive microfluidicsTCSPC

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Area of Science:

  • Integrated photonics and microfluidics.
  • Advanced semiconductor device fabrication.
  • Biomedical engineering and sensor technology.

Background:

  • Single-photon avalanche diodes (SPADs) are crucial for sensitive light detection.
  • Microfluidic systems offer precise sample handling and manipulation.
  • Integrating these technologies presents challenges in miniaturization and alignment.

Purpose of the Study:

  • To develop a scalable, multiplexed biosensing platform by integrating CMOS-embedded microfluidics with SPAD sensors.
  • To enable independent channel addressability for parallel readout.
  • To reduce the distance between analyte and sensor for enhanced sensitivity.

Main Methods:

  • Utilizing subtractive microfluidics fabricated via selective wet-etching of the back-end-of-line (BEOL) metal routing.
  • Positioning microfluidic channels directly above SPAD sensors.
  • Achieving precise alignment between microfluidic channels and SPAD active regions.

Main Results:

  • Demonstrated integration of CMOS microfluidics with SPAD fluorescence lifetime sensors.
  • Achieved a reduced analyte-to-active-region spacing of 7 μm.
  • Successfully performed simultaneous readout from two SPADs under separate fluidic channels.

Conclusions:

  • Established a pathway for scalable, multiplexed lab-on-CMOS biosensing platforms.
  • The developed technology enables parallel processing and independent channel control.
  • This integration holds significant potential for advanced point-of-care diagnostics and research tools.