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An Ultrasonic Micro-Tool Assisted Platform for Post-Processing of Micrometer-Scale Copper Wires.

Xu Wang1, Zhiwei Xu1, Chengjia Zhu1

  • 1College of Mechanical and Electronic Engineering, Nanjing Forestry University, Nanjing 210037, China.

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|May 4, 2026
PubMed
Summary

Ultrasonic micro-machining precisely forms fine copper wires using focused vibration energy. A hard stainless steel tool with plastic support and controlled feed speed achieved optimal results for microelectronics applications.

Keywords:
fine copper wiremicro-tool actuationmicro-tool designprecision micro-manufacturingultrasonic microactuation-assisted micro-forming

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Area of Science:

  • Materials Science
  • Mechanical Engineering
  • Nanotechnology

Background:

  • Micrometer-scale copper wires are crucial in microelectronics and precision manufacturing.
  • Their small size and low rigidity present significant challenges for fixation and forming.
  • Acoustic microactuation offers precise control for microscale material processing.

Purpose of the Study:

  • To develop and investigate an ultrasonic post-processing method for controllable forming of fine copper wires.
  • To enhance processing stability and forming accuracy using ultrasonic vibration energy focusing.
  • To establish an acoustically driven micromachine platform for microactuation.

Main Methods:

  • An experimental platform for ultrasonic processing of copper wires was established.
  • Multiple micro-tool designs (glass fiber, supported stainless steel, elastic hard stainless steel) were evaluated.
  • Single-point and continuous processing experiments analyzed the influence of tool material, support, and feed speed.

Main Results:

  • A hard 304 stainless steel micro-tool with a hard plastic ring support demonstrated superior performance.
  • Feed speed significantly impacted processing depth, with a maximum average depth of 0.95 μm at 1 mm/min.
  • The study confirmed the effectiveness of ultrasonic vibration in enhancing local deformation during micro-machining.

Conclusions:

  • Ultrasonic processing is a feasible method for the effective forming of micrometer-scale copper wires.
  • Optimal micro-tool design and precise feed speed control are critical for stable and accurate results.
  • The developed platform provides a stable and reliable approach for microactuation and precision manufacturing.