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Microsphere-Modulated Sensing-in-Energy Supercapacitor With Self-Filtering Ultra-Large Signal Under High-g Shocks.

Zhihao Zheng1, Yiqun Wang1, Kaiyou Liu1

  • 1Department of Precision Instrument, Tsinghua University, Beijing, China.

Advanced Science (Weinheim, Baden-Wurttemberg, Germany)
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Summary
This summary is machine-generated.

This study introduces a novel Sensing-in-Energy (SiE) microdevice that stabilizes power supply and reduces signal oscillation in microsystems under extreme overload. The microdevice uses a MEMS inertial structure within a supercapacitor for reliable energy harvesting and sensing in harsh conditions.

Keywords:
Sensing‐in‐Energyhigh‐g shockmicrosphere‐modulated switchmicrosupercapacitorself‐filtering

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Area of Science:

  • Micro-electromechanical systems (MEMS)
  • Energy harvesting
  • Sensor technology

Background:

  • Miniaturization and multi-functional integration are key for next-generation microsystems.
  • Extreme overload conditions (>10,000 g) cause signal oscillation and unstable energy supply in current microdevices.

Purpose of the Study:

  • To propose a novel Sensing-in-Energy (SiE) microdevice to overcome signal oscillation and energy instability under extreme overload.
  • To leverage MEMS technology and supercapacitor principles for enhanced microdevice performance.

Main Methods:

  • Designed a SiE microdevice with a MEMS movable inertial structure integrated into a supercapacitor electrolyte cavity.
  • Utilized high-g shock-driven transient contact between microspheres and electrodes for signal modulation.
  • Employed electrolyte damping for signal self-filtering and developed a multi-physics design method (fluid-structure interaction and electrical contact theory).

Main Results:

  • Achieved a high-range (30,000 g) and large-amplitude (450 mV) output with significantly reduced oscillation (90.84% reduction in signal adhesion coefficient).
  • The multi-physics design method reduced simulation-experiment error to within 8%.
  • Developed a high-precision microsphere embedding process with signal repeatability error below 10%.

Conclusions:

  • The SiE microdevice offers a new paradigm for designing robust microdevices for extreme environments.
  • This work provides a technical foundation for developing high-performance heterogeneous microsystems.
  • The proposed device enhances reliability and performance of micro-energy units and micro-sensors.