Microsphere-Modulated Sensing-in-Energy Supercapacitor With Self-Filtering Ultra-Large Signal Under High-g Shocks

Driven by the "More than Moore" law, the miniaturization and multi-functional integration of micro-energy units and micro-sensors are crucial for next-generation compact microsystems. To address severe signal oscillation and unstable energy supply under continuous extreme overload (>10 000 g), this study proposes a Sensing-in-Energy (SiE) microdevice featuring a MEMS movable inertial structure built into a supercapacitor electrolyte cavity. This architecture leverages high-g shock-driven transient contact between embedded metal microspheres and the electrode to modulate the soft short-circuit sensing effect. By utilizing electrolyte damping for signal self-filtering, the device achieves a high-range (30 000 g) and large-amplitude (450 mV) output with weak oscillation (signal adhesion coefficient reduced by 90.84%). To ensure precise development of the SiE microdevice, a multi-physics-driven design method coupling transient fluid-structure interaction (FSI) and micro-nano scale rough electrical contact theory was established. This reveals the dynamic mapping laws from mechanical excitation to fluid-structure coupling interface response and electrochemical output, reducing simulation-experiment error to within 8%. Furthermore, a high-precision microsphere embedding process was developed to minimize manufacturing randomness, maintaining signal repeatability error below 10%. This work offers a new paradigm for designing SiE microdevices for extreme environments and lays a technical foundation for the development of future high-performance heterogeneous microsystems.